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Enabling technologies for MEMS and nanodevices
Title statement Enabling technologies for MEMS and nanodevices / edited by Henry Baltes ... [et al.] Cover Title Enabling technology for MEMS and nanodevices Issue data Weinheim : Wiley-VCH, c2013 Phys.des. xii, 427 s. : il. ISBN 978-3-527-33498-8 (brož.) Edition Advanced micro and nanosystems Internal Bibliographies/Indexes Note Obsahuje bibliografické odkazy a rejstřík Another responsib. Baltes, Henry (editor) Subj. Headings mikroelektromechanické systémy microelectromechanical systems * nanotechnologie nanotechnology Form, Genre sborníky miscellanea Conspect 621.38 - Elektronika UDC 621.38.049.77-022.53 , 62-022.532 , (082) Country Německo Language angličtina Document kind Books 
book
Call number Barcode Location Sublocation Info F/1046 (PřF) 3134037760 PřF PřF, KEF - Mgr. Vůjtek In-Library Use Only
Number of the records: 1